Photographs of (a) the microcooler mounted on the sample positioning stage (SS), (b) the sample shuttle holder (SSH) in detail, and (c) the shuttle (ST) and the stacking order of the coverslip (CS), AutoGrid (AG), spacer ring (SP), and screw (SC). Scale bars 10 mm, 5 mm, and 2 mm, respectively. (d) Microcooler thermal performance over time. and refer to the cold stage and shuttle holder temperatures (101.5 K and 107 K, respectively, when stabilized). The heater power required for temperature stabilization is also plotted ( and ). The shuttle holder temperature is stabilized within 10 to 20 mK as shown at the bottom. As cryopumping water from the rest gas slowly increases the radiative heat load, we changed the set point to 106 K at t = 6 h to have more heater power available for temperature stabilization. (e) Drift measured whilst regulating both cooler- and shuttle holder temperatures. (f) Peak-to-peak vibration amplitude as a function of frequency at 101 K cooler temperature () and different directions. These spectra were measured with the microcooler mounted on an aluminium dummy stage inside the focused ion-beam scanning electron microscope (FIB-SEM) system. The peak at 50 Hz originates from electrical interference.